Abstract
A three-dimensional, non-contacting metrology frame providing position and orientation information for an object in space is presented. The metrology system uses information from three position sensors and three laser beams to produce a six degree-of-freedom spatial representation of the object being measured. The metrology system shows potential for decreasing the cost and complexity of small motion, three-dimensional measuring devices while increasing range of motion. Potential applications include the metrology of scanning probe microscopy stages, optical fabrication devices, and magnetic read/write head research platforms. Several significant points are presented in this article. In order of importance, they are 1) description of the new system; 2) derivation of the forward and inverse kinematics of the new metrology frame; and 3) development of a methodology for determining the error budget of the system (standard approaches are not possible for this configuration). The feasibility of the approach is shown with the development of an example error budget for a fully general configuration.
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