Abstract
A versatile post-fabrication process to produce thinned, flat, back-illuminated charge-coupled devices (CCDs) has been developed at Jet Propulsion Laboratory's Microdevices Laboratory. This technique is compatible with many ultraviolet enhancement treatments and has been demonstrated with the delta doping process. The significance of this demonstration is that thinned, robust, and flat CCDs are produced without the use of epoxies or waxes using temperatures and materials that are compatible with standard CCD fabrication and delta doping processes. In our approach, the CCD is attached by thermocompression bonding to a specially-designed silicon substrate using gold-gold diffusion bonding prior to thinning. CCDs with optically flat membranes (10 - 20 micrometers ) were produced with excellent yield. These flat CCDs have been successfully delta doped. We will discuss the process of producing thinned flat CCDs, their delta doping, and our results to date.
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