Abstract
The transducers discussed are those which make use of the unique features of thin films. These include metal and semiconductor film strain gauges and manganin high pressure gauges for use in lubricated bearings. Optical transducers include photoresistors, vidicon screens, solar cells, and IR detectors with special reference to the use of hydrogenated amorphous silicon. Chemical sensors are discussed in terms of surface states arising from chemisorption of a gas on the film surface. Examples of oxide film sensors for various gases are given. Magnetic transducers include semiconductor and amorphous metal Hall effect devices and magnetoresistive devices. References are given for each of the transducers discussed.
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More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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