Abstract
A hybrid nanolaminates consisting of Al2O3/ZrO2/alucone (aluminum alkoxides with carbon-containing backbones) grown by atomic layer deposition (ALD) were reported for an encapsulation of organic light-emitting diodes (OLEDs). The electrical Ca test in this study was designed to measure the water vapor transmission rate (WVTR) of nanolaminates. We found that moisture barrier performance was improved with the increasing of the number of dyads (Al2O3/ZrO2/alucone) and the WVTR reached 8.5 × 10−5 g/m2/day at 25°C, relative humidity (RH) 85%. The half lifetime of a green OLED with the initial luminance of 1,500 cd/m2 reached 350 h using three pairs of the Al2O3 (15 nm)/ZrO2 (15 nm)/alucone (80 nm) as encapsulation layers.Electronic supplementary materialThe online version of this article (doi:10.1186/s11671-015-0857-8) contains supplementary material, which is available to authorized users.
Highlights
Active matrix organic light-emitting diodes (AM Organic lighting emitting diodes (OLED)) was focused as the next-generation display since its great advantages, vivid full color,high brightness, low power consumption, fast response time, and suitable for flexible display [1]
Metal oxide thin film has been the choices for Thin film encapsulation (TFE) materials such as aluminum oxide (Al2O3) and zirconium oxide (ZrO2) and titanium oxide (TiO2) grown by atomic layer deposition (ALD) since their superior protection forms moisture [4,5,6]
Surface morphology We have investigated the surface morphology of the encapsulation film using atomic force microscopy (AFM) measurement with a trapping mode on the silicon wafer substrate
Summary
Active matrix organic light-emitting diodes (AM OLED) was focused as the next-generation display since its great advantages, vivid full color ,high brightness, low power consumption, fast response time, and suitable for flexible display [1]. Thin film encapsulation (TFE) is considered as one of the most potent methods to ensure for protection from moisture and oxygen penetration in electronic devices [2,3]. Several researches have focused on the multilayered nanolaminate structure which comprised of inorganic materials have critical weaknesses such as cracking and pinhole defects in the layer surface [9,10]. To solve these problems, alternating inorganic and organic layer pairs is suggested as an encapsulation solution for OLED devices. An ALD/MLD combination structure has been proposed because ALD/MLD multilayers have very good film integrity which causes them to have advanced performance for thin film encapsulation [11-13]
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