Abstract
Dense and adhesive WO3 films were prepared on a silicon substrate by the cold gas dynamic spray process (or cold spray). In contrast to standard metallic coatings, there was no sizable crater formation and plastic deformation. However, the aggregation of raw powder particles of a relatively large size was found to be destroyed upon impact on the substrate, forming a highly irregular surface with very fine secondary particles and providing good interlocking powder and void reduction among the particles in the coating. High-resolution images of the substrate interface showed that particles at the interface were more densely packed and that good adhesion was obtained. There fore, the particle bombardment onto the first layer of the coating could provide enhanced adhesion to the substrate mechanically and/or chemically.
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