Abstract
The electrical and microstructural characteristics of 1 kΩ/sq thick-film thermistors with high positive temperature coefficients of resistivity, i.e., PTC 5093 (Du Pont) fired either on “green” LTCC (low-temperature co-fired ceramics) substrates or buried within LTCC structures, were evaluated. The thermistors were fired at different temperatures to study the influence of firing temperature on the electrical characteristics. The noise indices of the surface resistors fired at temperatures between 850 °C and 950 °C were very low, around −30 dB. The TCRs of the evaluated PTC thermistors were over 3000 × 10 −6/K. The dependence of the resistivity on the temperature between −25 °C and 125 °C was linear, with the values of R 2 being better than 0.9999, regardless of the processing conditions. These results show that PTC thermistors co-fired on LTCC substrates can be used for temperature sensors in MCM-Cs as well as in MEMS structures. However, when the thermistors were buried in the LTCC substrates, the LTCC structures delaminated during firing and blisters formed, leading to high sheet resistivities and high noise indices. This delamination is attributed to the different sintering rates of the PTC and LTCC materials as well as to the expansion of the air bubbles captured in the viscous glass of the PTC material.
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