Abstract
Thermophoresis is the movement of particles in a thermal gradient. It has the advantages of being simple to set up and to carry out. Here, it is used to prevent the recontamination of emitted particles smaller than 0.5 μm during the dry laser cleaning of particles not chemically bound to the substrate. Its use permits the efficiency of such dry laser cleaning to be greatly improved. A comparison between the thermophoretic and laminar flow techniques is carried out, showing that thermophoresis is more efficient.
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