Abstract
In this paper, a thermo-optic tuning optical waveguide sensor system based on a cascaded double micro-ring resonator is investigated. The system consists of a micro-ring resonator with the microheater as a reference ring and a micro-ring resonator with removing the upper cladding layers as a sensing ring, combined with a microfluidic control. The refractive index change of the sample is measured by the electric power change of the microheater. The experimental results show that the sensitivity of the thermo-optic tuning is 34.231 W/RIU (refractive index units), and the measurement range is 4.325 × 10−3 RIU, almost eight times larger than that of the cascaded double micro-ring resonator without thermo-optic tuning for the intensity interrogation.
Highlights
Integrated optical sensor devices have been widely used in micro-ring resonator [1,2], photonic crystal (PhC) [3], and Mach-Zehnder interferometers (MZI) [4] due to their high integration and miniaturization
We address the by the intensity peak width and provides a low detection limit (LOD)
An optical thermo-optic tuning cascaded ring double (TTCDR) sensing system based on the silicon on insulator (SOI) substrate has been fabricated by the complementary metal oxide semiconductor (CMOS)
Summary
Integrated optical sensor devices have been widely used in micro-ring resonator [1,2], photonic crystal (PhC) [3], and Mach-Zehnder interferometers (MZI) [4] due to their high integration and miniaturization. The shift of the resonance wavelength is converted into the change of the electric power by tuning the thermal heater The radii of both micro-rings are designed with 10 μm, and the sensitivity of the sensing system. Sensors 2020, 20, 5149 sensitivity of the sensing system is 15 mW/RIU (refractive index units), based on transverse electric (TE) polarized light Such sensing systems can provide a low detection limit of 3.9 × 10−6 refractive is. The detection limitintensity-sensing is limited by the sensitivity of order ofwith magnitude lowerchange than the Another scheme uses the power meter, which is an order of magnitude lower than the wavelength interrogation Another a cascade micro-ring configuration based on the rib waveguide and tracks the maximum spectral intensity-sensing uses a cascade micro-ring based on the rib waveguide tracks position by usingscheme peak tracking methods [17,18].
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