Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch

Abstract

This paper presents an in-depth thermomechanical analysis of zero-power micromechanical photoswitches (MPs) aiming at aggressive performance enhancement for applications that require ultralow infrared (IR) detection threshold. An accurate analytical model was first derived and used to maximize the thermal sensitivity of the MPs through a loop-based optimization program. With specific pre-defined boundary conditions, such a program can be used to generate a set of device geometrical parameters leading to highest possible thermal sensitivity without sacrificing the structural strength of the device (i.e., spring constant), which otherwise will have to be done with time-consuming numerical simulations. The optimized MPs show more than 4 times improvement in thermal sensitivity compared to previous demonstrations, thanks to the high thermal resistance and temperature sensitivity achieved using the thermomechanical model. The demonstrated theoretical analysis and thermomechanical optimization methods for the MPs are critical for the development of the next-generation zero-power IR sensors specifically designed for applications that require ultra-sensitive IR detection capability without compromising their sensor size, weight and power consumption. [2021-0231]