Abstract
A thermodynamic study is performed to investigate the compositional unstable nature of InxGa1−xN in the MOVPE growth. It is shown that explicit evidence of phase separation is not observed in the free energy–composition curve, but the InxGa1−xN alloy is very unstable near x=0.2. The vapor–solid distribution relationship, the growth efficiency and the phase diagram for deposition are calculated. It is shown that the unstable regions in which inhomogeneous compositions are formed exist in the InxGa1−xN alloy system and that the unstable regions occur in the small driving force of the deposition.
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