Abstract
A compact two-dimensional angle sensor with a measurement resolution that exhibits superior sensitivity has been designed based on the autocollimator principle to enable the precision measurement field to measure the pitch and yaw error motions of a moving object. The signal drift of this sensor affects the measured angle and is mainly caused by the change in environmental temperature. To improve the thermal stability of the sensor, computer simulation has been conducted using the finite element analysis software ANSYS 16. Simulation results show that the angle sensor is considerably stable to adopt mechanisms with a symmetrical structure. Thus, a modified optimal angle sensor is developed, and its thermal stability has been verified via contrast experiments. Compared with the original sensor, the average drift of the optimized angle sensor is reduced from 0.430 arcsec∕°C to 0.120 arcsec∕°C when the variation of the environmental temperature is 5 °C. The optimal angle sensor is ideal for high-precision measuring equipment.
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