Thermal spikes in Ag/Fe and Cu/Fe ion beam mixing

Abstract

Ion beam mixing has been studied since 1980, and since then a lot of experimental and theoretical work has been done and knowledge has been gathered. Nevertheless, there are still many fundamental aspects that need to be clarified and with that aim many experiments need to be performed. Copper and iron are miscible in the liquid state, while silver and iron are not. However, both systems are thermally immiscible in the solid state. In order to have an insight into the importance of mixing within thermal spikes during ion beam irradiation, we deposited Cu/Fe and Ag/Fe bilayers onto Si substrates and irradiated them at room temperature with 2 MeV Cu and 2.5 MeV Au ions. A combination of Rutherford backscattering spectrometry (RBS) and atomic force microscopy (AFM) was used to analyze the atomic transport at the interface and the morphology changes of the samples. From the element profiles at the interface we conclude a mixing efficiency, which is indeed larger than the prediction of the ballistic model in the Cu/Fe system and smaller in the Ag/Fe system. Since ballistic mixing is expected in any case, we argue that demixing and phase separation in the Ag/Fe system occur in the thermal spike phase of the cascade as a consequence of the positive heat of mixing. Further mixing does occur in the thermal spike in the Cu/Fe system and they remain mixed even at the solid state because of the high cooling rate. In addition, ion irradiation induces a large surface roughening of the Ag and Cu top layers as proven by AFM. This effect is important for the correct interpretation of the results. Furthermore, this recrystallization affects also the interface, producing a rough interface, that appears in the RBS spectra as an atomic ‘diffusion’ at the interface.