Abstract
The collisionless space-charge sheath of a capacitivelyc oupled rf discharge is investigated in the frequency regime ωpi ≪ω≪ωpe . Assuming Boltzmann distributed electrons and starting from an existing charge exchange model of the presheath a self-consistent analysis is presented.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.