Abstract
Theoretical analysis is performed for the angular distribution of fluorescent X-rays in a total-reflection-angle X-ray spectroscopy (TRAXS) experiment. The angular dependence of fluorescent X-ray intensity is caused by the interference effect between the direct beam and that reflected by the substrate surface. The calculation results agree with the experimental results reported by Hasegawa et al. [Jpn. J. Appl. Phys. 24 (1985) L387].
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