Abstract
The three dimensions (3-D) temperature field distribution (TFD) equation is established based on Newton’s law of cooling, which is focusing on optical anti-reflection films (OARFs) irradiated by flat-topped multi-Gaussian laser beam. The TFD of HfO2/SiO2 composite films coating on BK7 substrate(BK7:SiO2/HfO2) irradiated by single long-pulse laser is obtained by means of numerical simulation. The result shows that the thermal effect of OARFs is significant when irradiated by the flat-topped long-pulse laser. Moreover, the main damage of OARFs after long-pulse laser strikes is not films fusion but delamination. The delamination is caused by thermal conduction from the films to the BK7 substrate, then the fusing of BK7 substrate, following by the separation of films. The results provide a theoretical basis for progress analysis and mechanism study of long-pulse laser induced damage in OARFs.
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