Abstract
The variety of structures of Σ=3 incoherent twin boundary in β-SiC was studied by high resolution electron microscopy (HREM). The structure of Σ=3 incoherent twin boundary consists of an array of structural units and the array changes its features depending on its length. The array is comprised of aligned symmetrical structural units which are composed of 5, 7, and 6 membered rings in this order at short boundary, both symmetrical and asymmetrical structural units at middle boundary, and zigzag or obliquely distributed symmetrical structural units at long boundary. It is known from tight-binding calculation that the energy difference between the symmetrical 5-7-6 membered rings structural unit and the asymmetric one is not so large if Si atoms are reconstructed, and then both structures can occur. The results of HREM were in good agreement with the theoretical calculation.
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