Abstract
The use of scanning PIXE in conjunction with scanning transmission ion microscopy (STIM) and Rutherford backscattering spectrometry (RBS) represents a powerful combination of imaging and analytical techniques for microelectronics analysis. Nuclear microprobe results from four different devices are presented here which show the applications and advantages of PIXE and STIM in microelectronics analysis.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
