The Sensitivity of CVD Calculations to Physical Property Values

Abstract

A mathematical model that describes chemical vapor deposition in an impinging jet reactor has been used to assess the sensitivity of theoretical predictions to physical property values for intermediate species. Uncertainties in thermochemical data for a species have greatest impact on predicted deposition rates when the composition level of that species near the surface is comparable to the local compositions of the reactants. Under these circumstances, relatively small changes in the values of thermodynamic quantities used for the species can produce significant differences in deposition rates calculated under equilibrium conditions. Also, with the modified property values, different values of the kinetic parameters may be required to fit available experimental data, and this can lead to different interpretations of the rate‐limiting steps in the process. Quantitative information for chemical vapor deposition of boron from boron trichloride and hydrogen is presented.