Abstract
Microelectromechanical systems (MEMS) employing spatially and/or temporally nonuniform electric fields have been extensively employed to control the motion of suspended particles or fluid flow. Design and control of microelectromechanical processes require accurate calculations of the electric field distribution under varying electrolyte conditions. Polarization of electrodes under the application of an oscillating voltage difference produces dynamic electrical double layers. The capacitive nature of the double layers significantly inhibits the penetration of the electric field through the double layer and into the surrounding bulk electrolyte at low frequencies. This paper quantitatively discusses the effect of electrode impedance on the electric field distribution as a function of field frequency, electrolyte composition, and electrode zeta potential in microelectrode systems. The design principles for the electrode geometry and configuration are also discussed in terms of their effects on the electric field magnitude and nonuniformity.
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