Abstract
The problems that arise during the calibration of the reference plates of large-aperture interferometers are discussed and the methods for solving them are presented. It is shown that the repeatability of shapes of the reference plates after their rearrangements can be provided by selecting the mechanism of their fixing in place. It is demonstrated that the temperature deformations of the reference-plate surfaces can be determined from a numerical model. These measures have made it possible to calibrate the reference plates of the 630-mm interferometer with an accuracy of λ/1000 RMS (λ = 632.8 nm).
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