Abstract
The impregnated-electrode-type liquid-metal ion source has a porous tip structure produced by sintering tungsten powders. Thus, stable operation over a wide range of emission currents (a few to several hundred μA) is possible, since the liquid-metal flow rate can be controlled. In addition, various liquid metals at relatively high vapor pressure (maximum pressure: 0.3 Torr) can be ionized. This type is therefore suitable for general use as a metal ion source. With the newly designed double lens system to overcome large beam divergence, more than 200 μA of lithium ion current was transported over a distance of 0.4 m within an optical column 2 cm in diameter. After mass separation, more than 70 μA of Li + was obtained. Using multipoint emission to further intensify the current, a germanium ion current of mA order was obtained just after the extractor. This ion source can also be used for mufocusing applications, one of which is a new technique of direct deposition by focused ion beam.
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