Abstract
A general analytical and numerical technique for finding high-quality probe-forming systems is proposed and developed. This optimisation procedure includes mathematical and physical modeling based on the matrizant method and on the boundary element method, respectively.The Separated Russian Quadruplet with electrostatic quadrupole lenses consisting of four copper rods as the microprobe focusing system is numerically simulated. The influence of the rod diameter and the energy spread on the beam spot size is investigated for different emittances.
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