Abstract
ABSTRACTThe lower dielectric constant (k) insulator is required for faster, smaller, and higher performance integrated circuit of the microprocessor and other advanced semiconductor devices that are so important to modern electronics and information technologies. Aromatic polyimides are among the candidate materials of low k due to their high thermal stability, mechanical strength and chemical resistance.In this work, we show an 2,6-di-tert-butyl-9,10-diphenylanthracene core based novel polyimide which has been designed to have the lower polar imide concentration compared to that of conventional polyimides as well as the synthesis and characterization of its constitutional units, diamine and dianhydride.
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