Abstract
This paper reports two films, Ti/a-C and Ti/a-C:H, prepared on the Ti-6Al-4V alloys by magnetron sputtering in PVD and CVD process, respectively. The morphology and microstructure were characterized by Raman spectroscopy, scanning electron microscopy and transmission electron microscopy. Both films show nanosized Ti clusters incorporated into the amorphous carbon matrix. Mechanical properties of the films were investigated by nanoindentation and ball-on-disk tribo-test. Ti/a-C film shows a hardness as high as 40.9 GPa, while that of Ti/a-C:H is 12.2 GPa. Both films show reduced friction and high wear resistance.
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