The geometry change of carbon nanofilaments by SF6incorporation in a thermal chemical vapor deposition system

Abstract

Carbon nanofilaments (CNFs) could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using C H and H as source gases under thermal chemical vapor deposition system. By the incorporation of SF as a cyclic modulation manner, the geometries of carbon coils-related materials, such as nano-sized coil and wave-like nano- sized coil could be observed on the substrate. The characteristics (formation density and morphology) of as-grown CNFs with or without SF incorporation were investigated. Diameter size reduction for the individual CNFs-related shape and the enhancement of the formation density of CNFs-related material could be achieved by the incorporation of SF as a cyclic modulation manner. The cause for these results was discussed in association with the slightly increased etching ability by SF addition and the sulfur role in SF for the geometry change.