Abstract
We found that the Cesium Sputtering Ion Source is suitable to deliver small cluster ions. We obtained the record beam current for carbon cluster ions Cn with n=1 up to 10. The beam current for C2, C5, and C10 was 70.7μA, 1.29μA, and 116 nA respectively. The negative cluster ions of extraction Bn, Sin, and Gen and their applications are also reported.
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