Abstract
The optical resolution of the white light interferometer characterized by higher sensitively and accurately with 580nm wavelength approximately is 5nm. However, as a new non-contact measurement equipment, the white light interferometer has certain measurement errors. In this paper, we propose a novel method that the accuracy of the white light interference profiler is evaluated by measuring the nano grating standard structure. The standard step height and pitch sample were used in the measurement process, and the morphological characteristics of the sample were obtained by Fourier transform, phase modulation and phase splicing of the sampled data. The experimental results show that the horizontal and vertical extension uncertainty of the white light interference profiler is 174nm and 8.07nm, respectively.
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