Abstract
The effects of Zn acetate or/and Zn chloride as ZnO precursors have been studied on the c-preferred orientations of pure ZnO and ZnO films doped with aluminium obtained by spray pyrolysis. We have used aluminium nitrate and aluminium chloride as precursors for aluminium doping. The experiment uses factorial designs to reveal possible interactive effects between the ZnO precursors, and the aluminium doping on the crystalline texture obtained. We have determined the conditions to obtain c-preferred orientated thin films using mixtures of both ZnO precursors.
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