Abstract
A micro comb resonator loaded by alternating electric field is modeled by finite element method, The damping is analyzed by both Couette flow model and Stokes flow model. Structure faults are researched its effects on the dynamic characteristics of the micro comb resonator. The result shows that adhesion fault makes the resonance frequency higher and sensitivity reduction, while crack fault debases the resonance frequency and amplitude. When the crack is located near the end, the stress concentration at the crack location is highest, which is easy to induce the support beam broken.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
