Abstract
The development of electric and hybrid automobiles has gained momentum with the growth of interest in the field of miniaturization of electrode materials. In particular, technologies that improve the electrical property of stainless steel, while maintaining corrosion resistance, are gaining interest in terms of maintaining specific resistivity. The study on metal doping in diamond-like carbon coating is currently in progress to enhance the characteristics of conductivity and corrosion resistance with excellent properties such as corrosion resistance and lubrication coating. It is the process of using Cr arc with DLC coating to actuate AEGD. The change of I(D)/I(G) (Graphite peak (G) and disordered bond peak (D)) ratio and G-peak position in Cr-containing DLC film causes graphitization and thus lowers the basic electric resistance. Simultaneous input of nitrogen gas leads to deposition of CrN by a specific ratio of Cr and N in the DLC coating, and the nitrogen atoms replace hydrogen in bonding to increase the sp3 bond structure in the DLC film, in which CrN is not deposited, to result in specific resistivity of a specific value or less.
Highlights
This study focused on understanding the mechanism of chemical inertness and the electrical resistivity of nitrogen-doped Cr-C:H films deposited by plasma enhanced chemical vapor deposition (PECVD) and arc-enhanced glow discharge (AEGD)
Potentio-dynamic corrosion test results of Cr-C:H films formed according to the change in the amount of nitrogen gas flow rate. (a) Corrosion behavior of raw materials and Cr-C:H film; (b) Corrosion behavior of Cr-C:H film according to change of nitrogen gas flow rate. 202
The graphitization, which is the process of high energy Cr by arc and Arc Enhanced Glow Discharge (AEGD) affecting the coating film to increase the I(D)/I(G) ratio, significantly affected the increase of electric conductivity and affected the increase of I(D)/ I(G) ratio when the nitrogen existed in the sp3 structure, the electric conductivity saturated to a specific value
Summary
In response to the demand for lightweight electrode materials and miniaturization of electrode materials, attempts to raise electric efficiency and improve output by using stainless steel sheets instead of graphite materials to reduce resistance against power loss due to the passing of gases, while lowering the volume are being made, and achievements in this field has spurred the develop-. Diamond-like carbon (DLC) films possess valuable properties, such as smoothness, high lubrication chemical inertness, and extreme hardness. It is well known that the a-C:H films fabricated by plasma-enhanced chemical vapor deposition (PECVD) using hydrocarbon sources show very high electrical resistivity of over 108 Ω-cm. Researchers are showing interest in nano-crystalline carbon coating or coating that forms metal and carbide mixtures in many application studies, and research is being conducted on conductive DLC coating [4] [5]
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