Abstract
The effects of the alkyl chain length for AFM anodization nanolithography on different alkylsilane monolayers were demonstrated by fabricating line and dot patterns. The different threshold voltage was observed on different alkylsilane monolayers. The observed threshold voltage gaps between different SAMs may be caused by the electric energy needed to degrade the SAM and the organizations of the SAM with the different alkyl chain length in spite of the similar energy offset. The length of the alkyl chain affects the widths of lines in line patterns, and the diameters of dots in dot patterns, also.
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