Abstract
Ion implantation as an engineering tool is a powerful and relatively new technique for the surface modification of materials. The process has proved to be beneficial in many applications but the cost of the process has hindered its wider acceptance in industry for volume components and tools. In this paper the effects of developments in ion source and vacuum plant design are discussed with respect to their effect on the overall economics of the process. New more powerful ion sources, advanced control systems and manipulation devices all contribute to a significant reduction in unit costs. An examination of the economics of the process and the new technical developments suggest the distinguishing features required in ion implantation equipment designed for use in subcontractor job shop environments.
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