Abstract
We have designed and tested two primary ion beam systems for the generation of polyatomic beams for high mass SIMS. These are a gold cluster ion gun and a C60 ion gun. The two systems offer different performance benefits in terms of spatial resolution, mass range and ion yields. The gold system provides a general purpose tool with beams suitable for high spatial resolution and beams suitable for high mass range SIMS; the C60 system provides outstanding ion yields, especially at high mass. We present results of sputter yield measurements for C60 bombardment of silicon. These suggest that C60 sputters with very high efficiency.
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