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Abstract
The exponential growth of AI technology is transforming the global semiconductor industry. The significant demand for high-performance computing chips for AI is driving continuous innovation in the semiconductor industry. As the evolution of Moore's Law is slowing down, new technologies should be explored to continue Moore's Law. The development of semiconductors will become more diverse in the future. New-structure transistors, new semiconductor materials, three-dimensional integrated circuits (3DICs), and DTCO are all potential avenues for the future development of semiconductors. A study of the evolutionary trend of the semiconductor is highly valuable. This paper presents a historical analysis of the development of semiconductor processes from 1947 to the present day, with a particular focus on the structure of FinFET and GAA. This article presents three examples of DTCO for the purpose of enhancing transistor density. Based on the findings of this analysis, it can be concluded that DTCO is the most effective and cost-effective method for increasing transistor density, and that DTCO will play an important role in the future development of semiconductors.
Published Version
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