Abstract
Hot filament CVD method can be used to grow micron-sized diamond crystals of several millions per square centimeter. These crystals possess fully developed facets. Such euhedral diamond crystals of uniform size may not scratch workpieces. Moreover, the smooth surfaces can minimize the adhered impurities, therefore the contamination of products may be avoided. They are the ideal superabrasives for polishing high valued materials such as semiconductors.
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