Abstract
ABSTRACT The PLT thin films were prepared on the various substrates by RF magnetron sputtering with using PLT ceramic targets. The X-ray diffraction (XRD) and piezoresponse force microscopy (PFM) were used for determining the crystalline and domain properties of the PLT films. The experiment results show that the pure perovskite structure was formed in the PLT thin films under the optimum deposition condition. The crystalline properties of PLT ferroelectric thin films were dependence of the experimental air pressure, the ratio of O2 and Ar2, annealing temperature and so on. PFM images showed that the 180° domain was the main domain structure of PLT thin films. The higher annealing temperature could help to form larger domain in the PLT thin films.
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