The cryopumping of water vapour in the continuum pressure region

Abstract

Abstract Pumping speed measurements in the continuum pressure region, P >10 −3 torr, have been made for water vapour impinging on copper spheres and coils cooled to liquid nitrogen temperatures. Water vapour flow rates between 0.06 mg s −1 and 420 mg s −1 were used. The volumetric pumping speed was constant over the pressure range 2 × 10 −3 torr to 2 × 10 −2 torr and was, as expected, higher than that obtained in the free molecular flow region. Above 2 × 10 −2 torr the pumping speed decreased and possible reasons for this were investigated and are discussed. These included the effects of inadequate heat transfer from the liquid nitrogen refrigerant to the cryopump, a poor thermal conductivity of the cryodeposit, and an impurity, nitrogen gas, in the water vapour.