Abstract
The effect of noble gas cluster species on the cluster interaction with solid surfaces was investigated. Processes of Ar, Kr and Xe clusters interaction with Cu and Mo surfaces were studied using molecular dynamics simulations. It is shown that lighter cluster front atoms undergo more backscattering from surface atoms, causing more intense multiple collisions between cluster atoms. This affects cluster penetration, energy exchange between the cluster and surface atoms, and cluster thermalization. The influence of energy per cluster atom on these effects is discussed.
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