Abstract
The current ion beam performance of the Genus G-1500 MeV ion implanter is described in this paper. Substantial improvements of beam currents have been realized by modification of the hot-cathode PIG source used on the ion implanter. Approximately 250 μA of 11B − and 1100 μA of 31P − are routinely achieved at the injector Faraday cup of the G-1500 system. Typical maximum beam currents of boron and phosphorus on target are ~ 110 μA and ~ 350 μA, respectively. Recent results of acceleration of carbon, oxygen and silicon are also described. Finally, the result of unique neutral-hydrogen-molecule injection into the tandem accelerator to obtain H + on the target is given in this paper.
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