Abstract
Asymmetric Bragg reflections have been applied in precise lattice-parameter determinations of thin, near-surface single-crystal layers. The measurements were performed by the Bond method which combines considerable simplicity and high accuracy. The reflection asymmetry greatly reduces the penetration depth of X-rays but requires a careful application of proper corrections. An example is described of the measurement of lattice-parameter changes in the near-surface layer of a silicon crystal doped with boron.
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