Abstract
The application of a low loss detector is demonstrated as a quantification aid in scanning Auger microscopy. The low loss detector collects only those electrons that have lost less than a few hundred electron volts during their passage within, and escape from the specimen. The signal thus generated originates from within a comparable information depth to that of the Auger signal and the contrast is predominantly due to the average atomic number within this information depth. Calibration of the detector using elemental standards enables rapid identification of the position of, and the local atomic number of the various phases present at the surface of the specimen. This allows rapid identification of the regions for subsequent Auger spectroscopy or imaging. The low loss detector is deemed superior to conventional secondary or backscattered electron detectors for this purpose. The methodology is demonstrated on a W/TiN/Ti/Si system of trenches and contact holes that had been back polished in order to generate a bevelled cross-section through the structure.
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