Abstract

A review of the temperature stability issues associated with BaxSr1−xTiO3 (BST) thin films and a summary of innovative materials designs, and novel process science solutions which serve to help mitigate this temperature sensitivity is presented. The experimental results from the literature and from our own work are reviewed; the correspondence between the theoretical results and the measured properties of tunable materials is critically analyzed; and reasons for discrepancy between literature results are discussed. Particular emphasis is concentrated on tunable phase shifters and filters to enable phased array antennas, radars and other advanced communications devices. This critical review provides the foundation to spawn new materials research solutions to further enable the development of BST films for microwave device applications.

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