Abstract
We report the development of scanning thermoreflectance thermometry and its application for steady and dynamic temperature measurement of a heated microcantilever. The local thermoreflectance signal of the heated microcantilever was calibrated to temperature while the cantilever was under steady and periodic heating operation. The temperature resolution of our approach is 0.6 K, and the spatial resolution is 2 μm, which are comparable to micro-Raman thermometry. However, the temporal resolution of our approach is about 10 μsec, which is significantly faster than micro-Raman thermometry. When the heated microcantilever is periodically heated with frequency up to 100 kHz, we can measure both the in-phase and out-of-phase components of the temperature oscillation. For increasing heating frequency, the measured cantilever AC temperature distribution tends to be confined in the vicinity of the heater region and becomes increasingly out of phase with the driving signal. These results compare well with finite element simulations.
Highlights
By inspecting several heated microcantilevers from the same batch, we found that the oscillatory thermoreflectance signals are due to interference of multiply reflected laser light inside the cantilever, strongly depend on the thickness of the heated microcantilever
We developed DC and AC thermal characterization techniques for heated microcantilevers by measuring and analyzing thermoreflectance signals at various input powers and frequencies
Through the AC thermoreflectance measurement at various modulation frequencies, we demonstrated that the thermoreflectance thermometry can measure the temperature oscillation with in-phase and out-of-phase components due to its superior temporal resolution
Summary
A heated microcantilever is a functional atomic force microscope cantilever that has an integrated microscale heater near the scanning tip. With highly localized heating capability, heated microcantilevers are actively used for nanoscale thermal manufacturing and metrology on various materials, including polymers, explosives, carbon nanotubes, and graphene. Periodic heating (or AC) operation of heated microcantilevers is a promising technique that offers unique metrology applications, including thermomechanical actuation, thermal topographic imaging, and local thermal analysis. AC thermal characterization of heated microcantilevers to date mostly relies on theoretical modeling and indirect measurement. transient temperature measurements of a heated microcantilever was performed by acquiring temperature-dependent reflectance, measurements were limited to the pulsed operation in time domain at a fixed point and detailed discussion on temperature, spatial, and temporal resolutions was not provided. A heated microcantilever is a functional atomic force microscope cantilever that has an integrated microscale heater near the scanning tip.. With highly localized heating capability, heated microcantilevers are actively used for nanoscale thermal manufacturing and metrology on various materials, including polymers, explosives, carbon nanotubes, and graphene.. Periodic heating (or AC) operation of heated microcantilevers is a promising technique that offers unique metrology applications, including thermomechanical actuation, thermal topographic imaging, and local thermal analysis.. AC thermal characterization of heated microcantilevers to date mostly relies on theoretical modeling and indirect measurement.. Transient temperature measurements of a heated microcantilever was performed by acquiring temperature-dependent reflectance, measurements were limited to the pulsed operation in time domain at a fixed point and detailed discussion on temperature, spatial, and temporal resolutions was not provided. It is crucial to measure the temperature distribution of heated microcantilevers during AC operation
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