Abstract

The electron temperature of a 14.5 GHz ECR plasma is determined by measuring the electron bremsstrahlung spectra. The dependence of this temperature is studied as a function of the inlet gas pressure and the input microwave power for different gases, such as Ne and Ar. The measurements were made along the axis of the ECR plasma using a NaI(Tl) detector with suitable collimation to cut down on the high count rate.

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