Abstract
The temperature dependence of the amorphization in α-quartz by Ne-ion bombardment has been investigated using Rutherford Backscattering Spectrometry in channeling geometry (RBS-C). The experimental results show that the critical temperature T c for inhibiting amorphization in quartz is around 940 K. The damage depth profile χ( z, φ) is independent of the temperature and fluence and can be simulated with a power-law function [ χ( z, φ)∝( φF D( z)) 3] of the damage energy distribution F D( z). At low irradiation temperature, the critical dose φ c for amorphization is independent of the temperature but it strongly increases at higher temperatures with an activation energy of 0.28 eV and has been explained by out-diffusion model of Morehead and Crowder.
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