Targets emitting transition radiation for performing X-ray lithography by the tabletop synchrotron MIRRORCLE-20SX

Abstract

The tabletop storage ring synchrotron (SRS) MIRRORCLE-20SX is a powerful source of soft X-rays emitted from transition radiation (TR) targets. SRS can be used as a source for performing X-ray lithography (XRL) when it emits TR power P XRL⩾50–100 mW of photons having energy in the range 490–1860 eV. One-foil targets in SRS can emit a high TR power, and the electron beam geometry of MIRRORCLE-20SX requires using TR strip targets with a width ≅3 mm. P XRL emitted by one-foil strip TR targets is estimated for several foil materials, and varying foil thickness d. These results show that a target containing one C foil with d≅260 nm can be used for performing XRL. Target made of one collodion foil with d≅290 nm, and target of one Al foil with d≅200 nm emit less, but could also be used for XRL. We manufactured such targets by depositing layers of these materials on slide glass, using Teepol as a releasing agent, and subsequently floating them on a water surface. The C layer is prepared by a horizontal resistance thermal evaporation, and supported by a 270–300 nm thick collodion layer, formed onto the Teepol film. The Al layer is thermally evaporated.