Abstract
Indium-doped ZnO transparent conductive thin films were deposited on glass by ultrasonic spray pyrolysis (USP) to investigate the influence of various acids on the physical properties. The ZnO:In films were polycrystalline with (002) preferred orientation with various acids addition except for films with acetic acids. The film morphologies changed substantially with different acids in the precursor solutions. Compared with organic acids, films prepared with inorganic acids exhibited better crystal quality and stronger near-band-edge emission (NBE). The films with acetic acid addition obtained the lowest resistivity, highest mobility and carrier concentration due to the formation of compounds among acetate and metal cations. The resistivity reached as low as 6.7×10−3Ωcm with a maximum mobility of 24.7cm2V−1S−1 and a minimum carrier concentration of 2.36×1019cm−3 by tuning acetic acid concentration to 1.5M.
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