Abstract
A fixed polarizer, rotating polarizer, sample, fixed analyzer spectroscopic ellipsometer has been developed. This configuration eliminates the errors from the light source residual polarization and those from the monochromator and detection system. Explicit expressions for systematic errors are presented. Starting from a general formalism, we derived first-order expressions for the errors caused by azimuthal offsets and residual ellipticity introduced by imperfect polarizers and windows. It is shown that the calibration errors for the analyzer, the polarizer and the top zero error of the rotating polarizer may be eliminated by the usual two zone procedure with the exception of the errors originating from the imperfections of the cell windows. Comparison is made with measurement results.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
