Abstract
Tin dioxide nanoparticles and nanorods were successfully prepared by hydrothermal method using tin chloride, liquid ammonia, sodium hydroxide and cetyltrimethyl ammonium bromide (CTAB) as starting materials. The crystalline and structure features of the tin dioxide nanomaterial were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and energy dispersive X-ray analysis. Sensor devices were fabricated by coating SnO2 nanomaterials on the front side of silicon substrates attached with Pt-interdigited electrodes before annealed at 600°C for 30 minutes. Also, the films were measured to LPG and alcohol vapor at operating temperature in the range of 220-330°C. In addition, the sensitivity and selectivity of sensor were discussed. [DOI: 10.1380/ejssnt.2011.503]
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