Synthesis of Silicon and Silicon Carbide Nanoparticles by Pulsed Electrical Discharges in Dielectric Liquids

Abstract

Silicon carbide (SiC) has been widely used in many applications, which require high mechanical endurance or high electrical resistance. It also serves as a basic material for light emitting diodes. Here, we present an in-liquid plasma method to produce SiC nanoparticles. A sustained spark-discharge in a dielectric liquid, which is energized by a nanosecond pulsed power supply, is established for the synthesis. To provide Si and C, we employed graphite and silicon as electrodes and cyclohexane (CHX) and tetramethylsilane (TMS) as dielectric liquids. For a reasonable comparison, we tested various combinations of electrode and liquid, namely Si-to-C in CHX, Si-to-Si in CHX, and C-to-C in TMS. We found that discharges in CHX produce Si particles encapsulated in C-shell and Si nanoparticles in C-matrix. Meanwhile, discharges in TMS consistently produce SiC nanoparticles with an average size of ~ 10 nm, regardless of the electrode material.